Part Number Description

9602-6000 Arsine (AsH3) (2E) 0.03-1.00 ppm

9602-6100 Phosphine (PH3) (2E) 0.05 - 1.00 ppm

9602-5300 Chlorine (Cl2) 0.15-5.00 ppm

9602-6400 Fluorine (F2) 0.05-5.00 ppm

9602-6800 Bromine (Br) 0.05-5.00 ppm

9602-5101 Hydrogen (H2) 0.05 - 4.00 %v 

9602-5100 Hydrogen (H2) 0.010 - 1.000 %v 

9602-9730 Octafluorocyclopentene (C5F8) 0.5 - 20.0 ppm (Low Flow Pyro Only)

9602-6500 Hydrogen Fluoride (HF) 0.5 - 10.0 ppm

9602-9700 Nitrogen Trifluoride (NF3) 1 - 50 ppm (For Pyrolyzer Only)

9602-9710 Sulfur Hexafluoride (SF6) 0 - 0.500 %v  (For Pyrolyzer Only)

9602-9720 Methyl Fluoride (CH3F) 0 - 0.0500 %v  (For Pyrolyzer Only)

9602-9732 Hexafluorobutadiene (C4F6) 0-50 ppm (For Pyrolyzer Only)

9602-6705 Ammonia (NH3) 15-1000 ppm

9602-6704 Ammonia (NH3) 5-100 ppm

9602-6715 Hexamethyldisilazane (HMDS) 0.010 - 0.500 %v 

9602-7300 Nitrogen Dioxide (NO2) 0.5 - 25.0 ppm

9602-7101 Ozone (O3) 0.05 - 1.00 ppm (Recommend 4 Sensors/yr)

9602-7400 Chlorine Dioxide (ClO2) 0.03-1.00 ppm

9602-6301 Silane (SiH4) 1.0 - 50.0 ppm

9602-6102 Phosphine (PH3) (LT) 0.05 - 1.00 ppm

9602-6202 Diborane (B2H6) 0.05-1.00 ppm

9602-6004 Arsine (AsH3) (LT) 0.03-1.00 ppm

9602-5601 Hydrogen Selenide (H2Se) 0.05 - 5.00 ppm

9602-9600 1,2 trans Dichloroethylene (DCE) 0-1000 ppm (Pyrolyzer Only)

9602-5800 Hydrogen Chloride (HCl) 1.0 - 30.0 ppm